X-Y scan range
X-Y方向扫描范围 |
90?m x 90?m typical, 85?m minimum
90?m × 90?m 典型值，最?5?m |
Z range
Z方向扫描范围 |
10?m typical in imaging and force curve modes, 9.5?m minimum
在成像及力曲线模式下典型值为10μm；最?.5μm |
Vertical noise floor
垂直方向噪音基底 |
< 30pm RMS in appropriate environment typical imaging bandwidth (up to 625Hz)
< 30pmRMS, 在合适的环境及典型的成像带宽(达到625Hz) |
X-Y position noise(closed-loop)
X-Y定位噪音(闭环) |
?.15nm RMS typical imaging bandwidth (up to 625Hz)
?.15nm RMS，典型成像带?达到625Hz) |
X-Y position noise(open-loop)
X-Y定位噪音(开? |
?.10nm RMS typical imaging bandwidth (up to 625Hz)
?.10nm RMS，典型成像带?达到625Hz) |
Z sensor noise level(closed-loop)
Z传感器噪音水?闭环) |
35pm RMS typical imaging bandwidth (up to 625Hz);
50pm RMS, force curve bandwidth (0.1Hz to 5kHz)
35pm RMS，典型成像带?达到625Hz);
50pm RMS，力曲线成像带宽(0.1Hz to 5kHz) |
Integral nonlinearity(X-Y-Z)
整体线性误?X-Y-Z) |
< 0.5% typical
< 0.5% 典型倻/span> |
Sample size/holder
样品尺寸/夹具 |
210mm vacuum chuck for samples, ?10mm diameter, ?5mm thick
210mm 真空吸盘样品台；夹具，直 ?10mm, 厚度 ?5mm |
Motorized position stage
(X-Y axis)
电动定位样品?X-Y?
|
180mm × 150mm inspectable area;
2?m repeatability, unidirectional;
3?m repeatability, bidirectional
180mm × 150mm可视区域;
单向2?m重复?
双向3?m重复?/span> |
Microscope optics
显微镜光学系绞br/> |
5-megapixel digital camera;
180?m to 1465?m viewing area;
Digital zoom and motorized focus
五百万像素数字照相机;
180?m?465?m可视范围;
数字缩放及自动对焦功胼/span> |
Controller
控制?/span> |
NanoScope V
NanoScope V型控制器 |
Workstation
工作竘/span> |
Integrates all controllers and provides ergonomic design with immediate physical
and visual access
整合所有控制器、结合人体工学设计，提供直接的物理或可视接口 |
Vibration isolation
振动隔绝 |
Integrated, pneumatic
整体式气动减震台 |
Acoustic isolation
声音隔绝 |
Operational in environments with up to 85dBC continuous acoustic noise
可隔绝环境中85 dBC的持续噪韲/span> |
AFM modes
AFM模式 |
Standard:ScanAsyst, PeakForce Tapping, TappingMode (air), Contact Mode, Lateral
Force Microscopy, PhaseImaging, Lift Mode, MFM, Force Spectroscopy, Force Volume,
EFM, Surface Potential, Piezoresponse Microscopy, Force Spectroscopy;
Optional:PeakForce QNM, HarmoniX, Nanoindentation, Nanomanipulation,
Nanolithograpy, Force Modulation (air/fluid), TappingMode (fluid), Torsional
Resonance Mode, Dark Lift, STM, SCM, C-AFM, SSRM, PeakForce TUNA,TUNA,
TR-TUNA, VITA |
Certification
认证 |
CE |
m.cnreagent.com
