?蚀刻剂/金属的匹配性表
|
Al |
Au |
Cr |
Cu |
Ni |
Si |
Si3N4 |
SiO2 |
Ti |
W |
GaAs |
Ta/TaN |
铜/span>A |
etch |
ok |
etch |
etch |
etch |
surfox |
slight |
ok |
ok |
ok |
etch |
surf ox |
铜/span>D |
etch |
ok |
slight |
ok |
ok |
ok |
slight |
ok |
ok |
ok |
ok |
ok |
铬蚀刻剂 1020 |
etch |
ok |
etch |
etch |
etch |
surfox |
ok |
ok |
ok |
ok |
etch |
surf ox |
铬蚀刻剂 1020 CRE-473 |
etch |
ok |
etch |
ok |
slight |
ok |
ok |
ok |
etch |
ok |
etch |
ok |
铬蚀刻剂 TFD |
etch |
ok |
etch |
etch |
etch |
surf ox |
ok |
ok |
ok |
ok |
etch |
surf ox |
铜蚀刻剂 100 |
etch |
ok |
slight |
etch |
etch |
ok |
ok |
ok |
slight |
ok |
etch |
ok |
铜蚀刻剂 200 |
etch |
ok |
slight |
etch |
etch |
ok |
ok |
ok |
slight |
ok |
etch |
ok |
铜蚀刻剂 APS-100 |
ok |
ok |
ok |
etch |
slight |
ok |
ok |
ok |
ok |
ok |
|
ok |
GE-8110 |
etch |
etch |
ok |
corrode |
ok |
ok |
ok |
ok |
ok |
ok |
etch |
ok |
GE-8111 |
etch |
etch |
ok |
corrode |
ok |
ok |
slight |
ok |
ok |
ok |
etch |
ok |
GE-8148 |
etch |
etch |
ok |
corrode |
ok |
ok |
ok |
ok |
ok |
ok |
etch |
ok |
金蚀刻剂 TFA |
etch |
etch |
ok |
corrode |
slight |
ok |
ok |
ok |
ok |
ok |
etch |
ok |
镍铬蚀刻剂 TFC |
etch |
ok |
etch |
etch |
etch |
surf ox |
ok |
ok |
ok |
ok |
etch |
surf ox |
镍铬蚀刻剂 TFN |
etch |
ok |
etch |
etch |
etch |
surf ox |
ok |
ok |
ok |
ok |
etch |
surf ox |
镍蚀刻剂 TFB |
etch |
ok |
etch |
etch |
etch |
surf ox |
ok |
ok |
ok |
ok |
etch |
surf ox |
镍蚀刻剂 TFG |
etch |
ok |
ok |
ok |
etch |
ok |
ok |
ok |
ok |
ok |
ok |
ok |
镍蚀刻剂 1垊/span> |
etch |
ok |
slight |
etch |
etch |
ok |
ok |
ok |
slight |
ok |
etch |
ok |
银蚀刻剂 TFS |
etch |
etch |
ok |
corrode |
slight |
ok |
ok |
ok |
ok |
ok |
etch |
ok |
氮化钼/span> 蚀刻剂Ⅱ/span> |
etch |
ok |
etch |
etch |
etch |
etch |
ok |
etch |
etch |
ok |
etch |
etch |
氮化钽蚀刻剂 SIE-8607 |
etch |
ok |
etch |
etch |
etch |
etch |
ok |
etch |
etch |
ok |
etch |
etch |
钛蚀刻剂 TFT |
etch |
ok |
etch |
ok |
ok |
ok |
etch |
etch |
etch |
ok |
etch |
ok |
钛蚀刻剂 TFTN |
etch |
ok |
etch |
slight |
slight |
ok |
ok |
ok |
etch |
ok |
etch |
ok |
钛-?/span> TiW-30 |
ok |
ok |
ok |
ok |
slight |
ok |
ok |
ok |
ok |
ok |
|
ok |
钨蚀刻剂 TFW |
etch |
etch |
etch |
ok |
etch |
slight |
ok |
slight |
ok |
etch |
etch |
ok |
?/span>: etch=显著蚀刻;slight=轻微浸蚀:/span>ok=不浸蚀:/span>surf ox=表面氧化:/span>corrode=表面腐蚀