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钛蚀刻剂TFTN

品牌: ?Transene
包装: 1加仑
交货朞� 现货
产地: 美国
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品牌:	?Transene
交货朞�	现货
产地:	美国
产品别名:	钛蚀刻剂TFT/TFTN

产品介绍

钛蚀刻剂是应用于半导体制作和薄膜微电子技术的选择性控制蚀刻剂�

钛蚀刻剂TFTN用来蚀刻玻璃或SiO ₂基板上的Ti沉积膜。TFTN不含氢氟酸、�/div>

Titanium Etchant TFTN,Intended for etching Ti films deposited on glass or SiO₂substrates. TFTN does not contain hydrofluoric acid.

钛蚀刻剂TFT设计用来蚀刻通常在微电子产品中作为连结层和阻挡层的蒸发法薄膜的蚀刻剂。这种蚀刻剂光刻胶匹配性良好、分辨率高、边下蚀现象低、�div> Titanium Etchant TFT designed for etching evaporated films commonly employed as bonding and barrier layers in microelectronics. Excellent resolution, photo resist compatibility, and minimal undercutting are readily achieved.

性质	TFT	TFTN
外观	澄清水溶涱�/td>	澄清水溶涱�/td>
PH	1	1
闪点	不可燂�/td>	不可燂�/td>
贮存	室温	室温
有效朞�/td>	1平�/td>	1平�/td>
毒�?/td>	强酸	强酸
蚀刻容�?/td>	聚乙�?聚丙�?/td>	聚乙�?聚丙�?/td>
温度	20�?0ℂ�/td>	70�?5ℂ�/td>
蚀刻速率	25 ?/秒，20ℂ�/td>	10 ?/秒，70ℂ�/td>
蚀刻速率	50 ?/秒，30ℂ�/td>	50 ?/秒，80ℂ�/td>
冲洗	氳�/td>	氳�/td>
*匹配光刻胵�/td>	正性和负�?/td>	正性和负�?/td>
金属	—–�/td>	除Al以外的大多数金属

*KPR/KMER/KTFR：PKP(Transene)；AZ/RISTON/ETC.

PROPERTIES OF TRANSENE TITANIUM ETCHANT TFTN

How do I increase the etch rate?	1. The rate will approximately double with every 10°C increase in temperature.
How do I increase the etch rate?	2. Increase the rate of stirring or agitation.
How do I reduce the etch rate?	Adding 1 part deionized water to 2 parts etchant will reduce the etch rate approximately 50%.
Do I need to dilute the etchant?	No, it is ready to use.
How do I reduce undercutting?	Increase the rate of stirring or agitation.
Appearance	Clear, colorless
pH	Strongly acidic
Etch Rate at 70°C	10 ?/sec.
85°C	50 ?/sec.
Etch Capacity (rate declines at ~70%)	65 g/gallon
Shelf Life	1 year
Storage Conditions	Ambient
Filtration	0.2 um
Recommended Operating Temperatures	20-80oC (30-40oC most common)
Rinse	Deionized water
Photoresist Recommendations	KLT6000 Series, KLT 5300 Series, HARE SQ (SU-8 type), TRANSIST, or PKP-308PI
Select Compatible Materials	Au, SiO2, nitride
Select Incompatible Materials	Cu, Al
Compatible Plastics	HDPE, PP, Teflon, PFA, PVC
Country of Origin	USA
Availability	1-2 days
Packaging	HDPE
Isotropy	Isotropic
Incompatible Chemicals	Strong bases