X向量程：100mm

Z向量程：320mm

传感器范围：80μm

测量重复性：±1.5%

线性精度：±3%

测量参数： Ra、Rt、Rp、Rz(jis)、Rz（DIN）、Rz、Rvk、Rv、R3z、Rs、Rsm、Rc、Rsk、Rk、Rmax、Rpk、Mr1、Mr2、Rq、Rku、R△q